A novel synthetic route for fabricating dense aluminosilicate-based ceramics at relatively low temperatures (≤1000°C) is described. The method involves ion exchange of an appropriate zeolite powder, followed by fabrication and sintering, to form a dense ceramic. Anorthite, cordierite- and β-spodumene-based ceramic substrates with attractive physical properties for microelectronic packaging are obtained using these unusual precursors. A brief overview on the property requirements for substrates used in microelectronic packaging is outlined at the beginning of the article. © 1993 Indian Academy of Sciences.
CITATION STYLE
Subramanian, M. A., Corbin, D. R., & Chowdhry, U. (1993). Better ceramic substrates through zeolites. Bulletin of Materials Science, 16(6), 665–678. https://doi.org/10.1007/BF02757661
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