High quality polishing procedure of glass substrates: Application in integrated optics

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Abstract

A procedure to polish the edges of glass microscope slides (corning 2947B) for integrated optics is presented in this paper. As usual, the procedure includes six steps: cut of glass substrates, assembly of the glass substrates over a plane surface (blocking), grinding, polishing, disassembly (unblocking) and cleaning. It is possible to fabricate waveguides before or after the polishing procedure. Finally, the outcomes of a practical application are shown. In our opinion, the manufacture of integrated optics devices will increase gradually.

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Lazcano, H. E., Flores, J. L., Blanco, A., Hernández, A., Nieto, R., Martínez, J. L., … Hurtado, J. L. (2017). High quality polishing procedure of glass substrates: Application in integrated optics. In Conference Proceedings of the Society for Experimental Mechanics Series (Vol. 2017-January, pp. 355–363). Springer New York LLC. https://doi.org/10.1007/978-3-319-28513-9_49

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