Atomic nanofabrication: Perspectives for serial and parallel deposition

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Abstract

Recent advances in atomic nanofabrication with laser manipulated atomic beams are discussed with regard to the creation of arbitrary structures. © 2005 IOP Publishing Ltd.

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Meschede, D. (2005). Atomic nanofabrication: Perspectives for serial and parallel deposition. In Journal of Physics: Conference Series (Vol. 19, pp. 118–124). Institute of Physics Publishing. https://doi.org/10.1088/1742-6596/19/1/020

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