Abstract
Nanoparticles of about 1000 molecules of CO2 accelerated to 20 km/s are used for surface micromachining. Isolated impacts are found to generate hillocks of about 0.5 nm in height and 20 nm in radius on silicon. The cluster material penetrates up to 20 nm into the target, suggesting the initial formation of transitory craters that relax by elastic rebound.
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CITATION STYLE
APA
Gruber, A., & Gspann, J. (1997). Nanoparticle impact micromachining. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 15(6), 2362–2364. https://doi.org/10.1116/1.589647
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