Investigating the influence of Al-doping and background humidity on NO2 sensing characteristics of magnetron-sputtered SnO2 sensors

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Abstract

<p><strong>Abstract.</strong> Elevated temperatures and humidity contents affect response, lifetime and stability of metal-oxide gas sensors. Remarkable efforts are being made to improve the sensing characteristics of metal-oxide-based sensors operating under such conditions. Having versatile semiconducting properties, SnO<sub>2</sub> is prominently used for gas sensing applications. The aim of the present work is to demonstrate the capability of the Al-doped SnO<sub>2</sub> layer as NO<sub>2</sub> selective gas sensor working at high temperatures under the presence of humidity. Undoped SnO<sub>2</sub> and Al-doped SnO<sub>2</sub> (3 at. % Al) layers were prepared by the radio frequency (r.f.) reactive magnetron sputtering technique, having an average thickness of 2.5 μm. The sensor response of Al-doped SnO<sub>2</sub> samples was reduced in the presence of background synthetic air. Moreover, under dry argon conditions, Al doping contributes to obtain a stable signal and to lower cross-sensitivity to CO in the gas mixtures of CO + NO<sub>2</sub> at temperatures of 500 and 600 °C. The Al-doped SnO<sub>2</sub> sensors exhibit excellent chemical stability and sensitivity towards NO<sub>2</sub> gas at the temperature range of 400–600 °C under a humid environment. The sensors also showed satisfactory response (&amp;tau;<sub>res</sub> = 1.73 min) and recovery (&amp;tau;<sub>rec</sub> = 2.7 min) towards 50 ppm NO<sub>2</sub> in the presence of 10 % RH at 600 °C.</p>

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APA

Haidry, A. A., Kind, N., & Saruhan, B. (2015). Investigating the influence of Al-doping and background humidity on NO2 sensing characteristics of magnetron-sputtered SnO2 sensors. Journal of Sensors and Sensor Systems, 4(2), 271–280. https://doi.org/10.5194/jsss-4-271-2015

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