Microstructure evolution of nc-TiN/a-(C, CNx) nanocomposite films with different amorphous phase amounts

Citations of this article
Mendeley users who have this article in their library.


The microstructure evolution of two-phase nanocomposite Ti-C-N thin films grown by reactive close-field unbalanced magnetron sputtering in an Ar-N 2 gas mixture with microstructures comprising of nanocrystalline (nc-) Ti(N,C) phase surrounded by amorphous (a-) (C,CNx) matrix under different a-phase amounts have been investigated by using high-resolution transmission electron microscopy and Monte Carlo simulation. The results show that with the a-phase amounts increasing, the grain size decreasing and a size-dependent lognormal grain size distribution have been found in nanocomposite films. The formation mechanism of this microstructure evolution is attributed to the transformation of grain growth mode from the nc/nc-boundary-curvature-driven growth to the a/nc-boundary-curvature-driven growth accompanied with a convergence of energy on per grain boundary with grain size decreasing (i.e. a-phase amount increasing), leading to the tendency from the offlognormal size distribution to the lognormal one. When a-phase amount increases to about 28% with grain size reducing to let per grain boundary covered by one monolayer a-phase, the uniform diffusion-controlled growth is dominant, resulting in the lognormal grain size distribution. This study suggests an important implication to prepare the nanocomposite films with a well-controlled nanostructure. © 2013 The Authors. Published by Elsevier Ltd.




Guo, J., Hu, X. J., Lu, Y. H., & Shen, Y. G. (2013). Microstructure evolution of nc-TiN/a-(C, CNx) nanocomposite films with different amorphous phase amounts. In Procedia Engineering (Vol. 67, pp. 388–396). Elsevier Ltd. https://doi.org/10.1016/j.proeng.2013.12.038

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free