An experimental approach for the detection of harmful gases in presence of humidity has been applied for gas sensors based on p-type Cu-Al-Oxide thin films. The impact of deposition conditions on the surface, morphology and sensing properties of the semiconducting oxide thin films are investigated. Cu-Al-Oxide thin film with higher resistance can be applied as p-type resistive gas sensor for the detection of pollutant gases. Thin films were characterized by X-Ray Diffraction, scanning electron microscope, and Raman spectroscopy. We observed that inert atmosphere and deposition temperature play the important role to affect the structural and surface morphology of Cu-Al-Oxide thin films. Sensitivity of nanostructured thin films towards reducing and oxidizing gas are studied as a function of gas concentration and operating temperature.
Kumar, R., Baratto, C., Faglia, G., Sberveglieri, G., Vojisavljevic, K., & Malic, B. (2014). Tailoring and characterization of porous hierarchical nanostructured p type thin film of Cu-Al-Oxide for the detection of pollutant gases. In Procedia Engineering (Vol. 87, pp. 252–255). Elsevier Ltd. https://doi.org/10.1016/j.proeng.2014.11.651