Background intensity determination in AES/XPS

Abstract

Some methods for deconvolution of the background intensities of inelastically scattered electrons from observed AES/XPS spectra are discussed. It is found that a frequently used empirical deconvolution method introduces significant inaccuracies. The Tougaard deconvolution formula is generalised to include elastic scattering effects, whose effects are considered for a range of electron transport models. © 1988.