Some methods for deconvolution of the background intensities of inelastically scattered electrons from observed AES/XPS spectra are discussed. It is found that a frequently used empirical deconvolution method introduces significant inaccuracies. The Tougaard deconvolution formula is generalised to include elastic scattering effects, whose effects are considered for a range of electron transport models. © 1988.
Dwyer, V. M., & Matthew, J. A. D. (1988). Background intensity determination in AES/XPS. Surface Science, 193(3), 549–568. https://doi.org/10.1016/0039-6028(88)90453-0