Background intensity determination in AES/XPS

  • Dwyer V
  • Matthew J
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Some methods for deconvolution of the background intensities of inelastically scattered electrons from observed AES/XPS spectra are discussed. It is found that a frequently used empirical deconvolution method introduces significant inaccuracies. The Tougaard deconvolution formula is generalised to include elastic scattering effects, whose effects are considered for a range of electron transport models. © 1988.

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  • V. M. Dwyer

  • J. A D Matthew

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