A new glancing incident X-ray fluorescence (GIXRF) spectrometer using parallel polycapillary X-ray lens has been developed. Integrated with a Zr filter and slits, a highly collimated and monochromatic X-ray beam has been achieved. This method eliminated the monochromator used in the conventional GIXRF method. Moreover the parallel X-ray lens increased the acceptance solid angle and hence increases intensities of the excitation spectrum. In this paper, this method has been applied in analysis of single crystal and film sample. © 2009.
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