Formation of β-SiC nanocrystals on Si(1 1 1) monocrystal during the HFCVD of diamond

Abstract

In this study thin Si(1 1 1) sample was prepared for top view observations by high resolution transmission electron microscopy (HRTEM). The very first steps of diamond nucleation on Si(1 1 1) by a HFCVD process are studied. We detect the polycrystalline growth of silicon carbide grains with a general pseudoepitaxic orientation SiC(2 2 0)//Si(2 2 0). They are relied by disoriented SiC grains. © 2001 Elsevier Science B.V.