Liquid helium cooled sample stage for scanning electron microscope

Abstract

A cryogenic stage is described for use with a Cambridge S4-10 scanning electron microscope. The stage is operated with liquid helium in direct contact with the back of the sample to be irradiated by the electron beam. This bath cryostat principle will work at temperatures between 1.5 K and 4.2 K with good cooling performance. The installation of the stage within the microscope does not require any modification of the microscope chamber or the detector arrangement. A precision adjustment of the sample perpendicular to the electron beam is achieved by micrometric screws. © 1982.