Modification of the optical properties of ZnO thin films by proton implantation

  • Ham Y
  • Park J
  • Lee W
 et al. 
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Optical properties of proton-implanted ZnO thin film prepared by radio-frequency (rf) magneton sputtering have been studied, the optical constants being obtained from the reflectance measurements by employing Cauchy-Urbach model. Increase in the ordinary refractive index after proton implantation was explained by that in the polarizability. Besides, a slight increase in the optical band gap by proton implantation was identified and discussed in terms of the hydrogen shallow donors introduced by the proton implantation. © 2012 Elsevier Ltd.

Author-supplied keywords

  • A. ZnO film
  • B. Proton implantation
  • D. Optical properties

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  • Yong Ju Ham

  • Jun Kue Park

  • W. Lee

  • Cheol Eui Lee

  • W. Park

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