Modification of the optical properties of ZnO thin films by proton implantation

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Abstract

Optical properties of proton-implanted ZnO thin film prepared by radio-frequency (rf) magneton sputtering have been studied, the optical constants being obtained from the reflectance measurements by employing Cauchy-Urbach model. Increase in the ordinary refractive index after proton implantation was explained by that in the polarizability. Besides, a slight increase in the optical band gap by proton implantation was identified and discussed in terms of the hydrogen shallow donors introduced by the proton implantation. © 2012 Elsevier Ltd.

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Ham, Y. J., Park, J. K., Lee, W., Lee, C. E., & Park, W. (2012). Modification of the optical properties of ZnO thin films by proton implantation. Materials Research Bulletin, 47(9), 2403–2406. https://doi.org/10.1016/j.materresbull.2012.05.029

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