Role of hydrogen dilution in improvement of a-SiGe:H alloys

  • Ganguly G
  • Matsuda A
  • 2


    Mendeley users who have this article in their library.
  • 13


    Citations of this article.


The reasons for the improvement of the properties of a-SiGe:H when using hydrogen diluted gas mixtures are reappraised and it is suggested that reduction of the contribution of short-lifetime-radicals to film-growth is the responsible cause. Using disilane-germane gas mixtures, very low power density and reasonably high pressure, the preferential depletion of germane to prepare material which is comparable to that prepared using hydrogen-diluted silane-germane gas mixtures has been avoided.

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document


  • Gautam Ganguly

  • Akihisa Matsuda

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free