Statistics of sputtering

  • Eckstein W
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Abstract

The statistics of the emission of sputtered particles is investigated with the Monte Carlo program TRIM SP. The probability of sputtering N atoms with N ≧ 0 per single projectile is determined for a wide range of projectile target combinations (mass ratio), incident ion energies and angles. The distribution of the probability of sputtering N atoms can be reasonable well described by a negative binomial distribution. © 1988.

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Authors

  • W. Eckstein

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