A tin oxide thin film sensor with high ethanol sensitivity

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Abstract

An SnO2thin film ethanol gas sensor has been fabricated by electron-gun evaporation and proper annealing in ambient oxygen gas. This processing yielded an SnO2thin film with fine particles and good structure, thus providing a sensor with a high sensitivity and selectivity in detecting ethanol gas. The main part of this paper is a report of the detailed preparation conditions, experimental data on sensing characterization and performance of the sensor. © 1989 Elsevier Sequoia/Printed in The Netherlands.

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Fang, Y. K., & Lee, J. J. (1989). A tin oxide thin film sensor with high ethanol sensitivity. Thin Solid Films, 169(1), 51–56. https://doi.org/10.1016/S0040-6090(89)80004-5

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