A tin oxide thin film sensor with high ethanol sensitivity

  • Fang Y
  • Lee J
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Abstract

An SnO2thin film ethanol gas sensor has been fabricated by electron-gun evaporation and proper annealing in ambient oxygen gas. This processing yielded an SnO2thin film with fine particles and good structure, thus providing a sensor with a high sensitivity and selectivity in detecting ethanol gas. The main part of this paper is a report of the detailed preparation conditions, experimental data on sensing characterization and performance of the sensor. © 1989 Elsevier Sequoia/Printed in The Netherlands.

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Authors

  • Y. K. Fang

  • J. J. Lee

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