Abstract
An SnO2 thin film ethanol gas sensor has been fabricated by electron-gun evaporation and proper annealing in ambient oxygen gas. This processing yielded an SnO2 thin film with fine particles and good structure, thus providing a sensor with a high sensitivity and selectivity in detecting ethanol gas. The main part of this paper is a report of the detailed preparation conditions, experimental data on sensing characterization and performance of the sensor. © 1989 Elsevier Sequoia/Printed in The Netherlands.
Cite
CITATION STYLE
Fang, Y. K., & Lee, J. J. (1989). A tin oxide thin film sensor with high ethanol sensitivity. Thin Solid Films, 169(1), 51–56. https://doi.org/10.1016/S0040-6090(89)80004-5
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