A transmission electron microscope was used to study the nature of small (100-250 Å) precipitates observed in semi-insulating Fe-doped InP layers grown by metalorganic chemical vapor deposition technique on (001) InP substrates. Since these precipitate particles did not dissolve in a Br-methanol etching solution, it was possible to isolate the particles on a carbon-coated electron microscope grid. Both electron diffraction and X-ray energy dispersive techniques have shown unambiguously that these particles are stoichiometric FeP crystals. © 1985.
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