Versatile tool for characterizing long-term stability and reliability of micromechanical structures

  • Kazinczi R
  • Mollinger J
  • Bossche A
  • 4

    Readers

    Mendeley users who have this article in their library.
  • 15

    Citations

    Citations of this article.

Abstract

Micromechanical devices have a wide range of applications in the near future. Therefore it is important to study their long-term behaviour under various conditions and environments. We introduce atomic force microscopy as a comprehensive tool in reliability study of MEMS devices. Mechanical properties of micromechanical structures can be characterized with high accuracy. Real-time monitoring of these properties during accelerated ageing tests gives information about the long-term stability of the structures. The AFM is a versatile instrument for predicting long-term operating of micromachined devices in a convenient way without building complicated experimental set-ups.

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document

Authors

  • R. Kazinczi

  • J. R. Mollinger

  • A. Bossche

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free