Micromechanical devices have a wide range of applications in the near future. Therefore it is important to study their long-term behaviour under various conditions and environments. We introduce atomic force microscopy as a comprehensive tool in reliability study of MEMS devices. Mechanical properties of micromechanical structures can be characterized with high accuracy. Real-time monitoring of these properties during accelerated ageing tests gives information about the long-term stability of the structures. The AFM is a versatile instrument for predicting long-term operating of micromachined devices in a convenient way without building complicated experimental set-ups.
Kazinczi, R., Mollinger, J. R., & Bossche, A. (2000). Versatile tool for characterizing long-term stability and reliability of micromechanical structures. Sensors and Actuators, A: Physical, 85(1), 84–89. https://doi.org/10.1016/S0924-4247(00)00331-9