Absolute interferometric test of Fresnel zone plates

Abstract

An absolute interferometric test of two-level binary Fresnel zone plates (FZPs) is presented. Five measurements with a wavefront testing interferometer are required to fully separate interferometer errors from those of the FZP. The method provides both errors, pattern errors and surface figure errors of the zone plate absolutely. The test method is suitable for zone mirrors and zone lenses. Test setups are explained, equations are derived and experimental results are presented. Further, applications of the absolute diffractive test method are described. For the estimation of the accuracy of the diffractive calibration method a comparison with the classical three-position test was carried out. © 2001 Elsevier Science B.V. All rights reserved.