Abstract
High volume sensors and actuators have been employed in automotive industry in millions per year and at a unit cost of a few dollars. The design and manufacturing of automotive sensors and actuators have increasingly relied on microelectromechanical systems (MEMS) technology. This presentation reviews micromachined automotive sensors and actuators, and the related MEMS technology.
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CITATION STYLE
APA
Sparks, D. R., Chang, S. C., & Eddy, D. S. (1998). Application of MEMS technology in automotive sensors and actuators. In Proceedings of the International Symposium on Micromechatronics and Human Science (pp. 9–15). IEEE. https://doi.org/10.1109/mhs.1998.745744
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