Application of MEMS technology in automotive sensors and actuators

  • Bouchaud B
  • Analyst P
  • Dixon R
 et al. 
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Abstract

This presentation provides an overview of current MEMS technology, its applications, and market share. MEMS-fabrication processes are described, and the challenges of MEMS compared to standard IC techniques are discussed. After a description of the evolution of MEMS, the presentation provides a short survey of MEMS applications. Then, the principles of the newest inertial sensors for ESP-systems are described, with an emphasis on the design concepts pertaining to the sensing element, and to the evaluation circuits, for achieving excellent performance. This presentation concludes with an outlook on arising new MEMS applications, such as energy harvesters and micro-fuel cells.

Author-supplied keywords

  • Acceleration sensors
  • Accelerometer
  • Accelerometers
  • Actuators
  • Angular rate sensors
  • Automotive body sensors
  • Automotive chassis sensors
  • Automotive powertrain sensors
  • Automotive systems
  • Electronics packaging
  • Gas chromatography
  • Gyro-sensor
  • Gyros
  • Industrial management
  • Information technology
  • Investments
  • MEMS
  • MEMS history
  • Marketing
  • Materials handling
  • Microelectromechanical devices
  • Microelectromechanical systems
  • Microelectronics
  • Micromachines
  • Microsystems
  • Neural probes
  • Noise
  • Obstacle detection sensors
  • Parasitic effect
  • Position sensors
  • Pressure sensors
  • Product development
  • Production control
  • Research and development management
  • Resonator
  • Review paper
  • Rotational motion sensors
  • Sales
  • Sensors
  • Si-MEMS
  • Silicon on insulator technology
  • Silicon wafers
  • State-of-the-art sensors
  • Trends and frontiers
  • Value engineering
  • Zero drift
  • inertial navigation system
  • long term bias stability

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Authors

  • By Jérémie Bouchaud

  • Principal Analyst

  • Richard Dixon

  • Senior Analyst

  • Janusz Bryzek

  • B.S. Davis

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