Direct parameter extraction for piezoresistively-sensed MEMS resonators embedded in parasitic capacitive feedthrough

  • Zhu H
  • Lee J
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In this paper, we report a method to extract important parameters such as quality factor, motional transconductance and resonant frequency directly from the measured electrical transmission characteristic of a piezoresistively-sensed MEMS resonator embedded in feedthrough. The method has been applied to measurements for a square-extensional mode resonator where the resonant peak is only 0.22dB due to substantial feedthrough. The extracted parameters, derived using this method compare well with the corresponding values obtained using a Lorentzian fit to within 5%. © 2011 Published by Elsevier Ltd.

Author-supplied keywords

  • Feedthrough
  • Piezoresistive
  • Resonator

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  • Haoshen Zhu

  • Joshua E Y Lee

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