Direct parameter extraction for piezoresistively-sensed MEMS resonators embedded in parasitic capacitive feedthrough

Abstract

In this paper, we report a method to extract important parameters such as quality factor, motional transconductance and resonant frequency directly from the measured electrical transmission characteristic of a piezoresistively-sensed MEMS resonator embedded in feedthrough. The method has been applied to measurements for a square-extensional mode resonator where the resonant peak is only 0.22dB due to substantial feedthrough. The extracted parameters, derived using this method compare well with the corresponding values obtained using a Lorentzian fit to within 5%. © 2011 Published by Elsevier Ltd.