Eigenfrequencies and quality factors of nanofilm resonators with dissipative surface stress effects

  • Hasheminejad S
  • Gheshlaghi B
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Abstract

A dissipative surface stress model is adopted to study the size-dependent surface dissipation effect on the quality factor and natural frequencies of vibrating elastic nanofilms (NFs). Kirchhoff plate theory along with the classic Zener model for interior friction in the presence of an initial surface tension is employed to obtain the frequency-dependent quality factor and the differential equation of flexural motion. Resonance frequencies and quality as a function of thickness for square NFs of selected material relaxation times with simply-supported edge conditions are presented and discussed. © 2012.

Author-supplied keywords

  • Free oscillations
  • NEMS/MEMS
  • Nanoplates
  • Q-factor
  • Surface dissipation

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Authors

  • Seyyed M. Hasheminejad

  • Behnam Gheshlaghi

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