Gas sensors: New materials and processing approaches

Abstract

To satisfy demands for detecting chemicals in the environment, versatile sensors are required to detect a rapidly growing range of chemical species. In this paper, focus is directed on progress being made to develop temperature-independent oxygen sensors based on the perovskite solid solution system SrTi1-x Fe x O3-δ,and on improving the sensitivity of thin film gas sensors integrated on Si-based self heated substrates. A novel strategy to produce macroporous films with high surface area for enhanced chemical activity is described, and how this processing strategy results in markedly improved sensitivity of gas sensors based on a novel material, CaCu3Ti4O12, is demonstrated. © Springer Science + Business Media, LLC 2006.