Influence of laser intensity and pulse duration on the extreme ultraviolet yield from a water jet target laser plasma

  • Vogt U
  • Stiel H
  • Will I
 et al. 
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Extreme ultraviolet (EUV) emission in the 11-15 nm wavelength
range from a thin liquid water jet target under illumination with
a high repetition rate, high average power laser (Nd-YLF) has
been studied. To find the optimum conversion efficiency of laser
light into EUV radiation, different laser parameters were
applied. The laser intensity was varied between 10/sup 11/ and
10/sup 15/ W/cm/sup 2/, and pulse duration in the range from 30
ps to 3 ns. A maximum conversion efficiency of 0.12% in 2.2%
bandwidth and 4 pi steradian at 13 nm was achieved at a
repetition rate of 250 kHz, and a strong dependence of the
conversion efficiency on both laser intensity and pulse duration
was found

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  • U. Vogt

  • H. Stiel

  • I. Will

  • P. V. Nickles

  • W. Sandner

  • M. Wieland

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