Influence of substrate bias on the mechanical properties of ta-C:Co films prepared by filtered cathodic vacuum arc technique

  • Guo J
  • Tay B
  • Sun X
 et al. 
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Abstract

Cobalt-containing tetrahedral amorphous carbon (ta-C:Co) films were deposited by an off-plane double-bend filtered cathodic vacuum arc (FCVA) technique on silicon wafers at room temperature. The mechanical properties of the ta-C:Co films were systematically studied. Such metal composite coatings exhibit reduced stress, thus enabling the deposition of relatively thick coatings whilst retaining acceptable hardness.

Author-supplied keywords

  • diamond-like carbon
  • filtered cathodic vacuum arc
  • tetrahedral amorphous carbon

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Authors

  • J.X. Guo

  • B.K. Tay

  • X.W. Sun

  • X.Z. Ding

  • D.H.C. Chua

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