A MEMS conical spring actuator array

  • Fukushige T
  • Hata S
  • Shimokohbe A
  • 28

    Readers

    Mendeley users who have this article in their library.
  • 70

    Citations

    Citations of this article.

Abstract

A new MEMS conical spring actuator array is proposed. Previously, we have developed conical spring microactuators having a long stroke (180 μm) in the out-of-plane direction. However, the maximum output force and the packing density were not satisfactory. In the present paper, mechanical and electrical models of a conical spring are described for the calculation of the maximum output force and the driving voltage. Geometrical parameters were optimized using these models and a new geometry for the actuator was derived. The new geometry incorporates a wider and thicker spring that increased the maximum output force from 0.087 mN up to 0.83 mN. The packing density was increased up to 1 actuator/mm2 using an additional interconnect layer. In addition, the driving voltage was decreased using a thinner insulating layer. The use of an ac drive prevented the sticking of the actuator during operation. A detailed investigation of the ac drive was also performed.

Author-supplied keywords

  • AC drive
  • Conical spring microactuator
  • Out-of-plane
  • Thin film metallic glass
  • Three-dimensional (3-D) shape

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document

Authors

  • Takashi Fukushige

  • Seiichi Hata

  • Akira Shimokohbe

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free