A novel plane mirror interferometer without using corner cube reflectors

Abstract

The conception and properties will be introduced of an interferometer that exclusively uses plane mirrors as reflectors; thus, these interferometers correspond well to the original Michelson interferometer. First, the relationship between the interference conditions and the detection with photodiodes will be discussed using the example of known interferometers as well as reasons given for primarily using corner cube reflectors in these devices. Next, the conceptual design of the plane mirror interferometer will be presented. This type of interferometer possesses new properties which are significant for metrological and technical applications. Only one measuring beam exists between the polarizing beam splitter and the measuring mirror and this beam alone represents the Abbe axis. This property allows the significant reduction of the Abbe error. The interferometer is able to tolerate tilting on the order of about 1′. This ensures the orthogonality between the measuring beam and the measuring mirror during the measurement. This property can be used in three-dimensional measurements to erect the three measuring beams as a x-y-z Cartesian coordinate system on the basis of three orthogonal mirrors. The plane-mirror interferometer also allows non-contact measurements of planar and curved surfaces, e.g. silicon wafers. © 2006 IOP Publishing Ltd.