A novel plane mirror interferometer without using corner cube reflectors

  • Büchner H
  • Jäger G
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Abstract

The conception and properties will be introduced of an interferometer
that exclusively uses plane mirrors as reflectors; thus, these interferometers
correspond well to the original Michelson interferometer. First,
the relationship between the interference conditions and the detection
with photodiodes will be discussed using the example of known interferometers
as well as reasons given for primarily using corner cube reflectors
in these devices. Next, the conceptual design of the plane mirror
interferometer will be presented. This type of interferometer possesses
new properties which are significant for metrological and technical
applications. Only one measuring beam exists between the polarizing
beam splitter and the measuring mirror and this beam alone represents
the Abbe axis. This property allows the significant reduction of
the Abbe error. The interferometer is able to tolerate tilting on
the order of about 1'. This ensures the orthogonality between the
measuring beam and the measuring mirror during the measurement. This
property can be used in three-dimensional measurements to erect the
three measuring beams as a x – y – z Cartesian coordinate system
on the basis of three orthogonal mirrors. The plane-mirror interferometer
also allows non-contact measurements of planar and curved surfaces,
e.g. silicon wafers.

Author-supplied keywords

  • Displacement measurement
  • Interferometer
  • Multi-coordinate measurement
  • Plane-mirror reflectors

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Authors

  • H. J. Büchner

  • G. Jäger

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