Optically driven micropump produced by three-dimensional two-photon microfabrication

Abstract

An optically driven lobed micropump was developed using three-dimensional two-photon microfabrication. The two built-in rotors, 9 μm in diameter, are cooperatively driven by means of time-divided scanning of a single laser beam. It was demonstrated that a tracer particle was moved by simultaneously rotating the two rotors. The velocity of the tracer particle was proportional to the rotation speed of the rotors in the range of 0.2-0.7 μms. The flow rate was estimated to be sub-pL/min level. This ultralow flow rate will be useful for further integration and miniaturization of micro-total-analysis systems. © 2006 American Institute of Physics.