Optimization and fabrication of thick flexible polymer based micro thermoelectric generator

  • Glatz W
  • Muntwyler S
  • Hierold C
 et al. 
  • 1


    Mendeley users who have this article in their library.
  • N/A


    Citations of this article.


We present a novel polymer based wafer level fabrication process for micro thermoelectric generators ([mu]TEGs) for the application on non-planar surfaces. The generators are fabricated by subsequent electrochemical deposition (ECD) of Cu and Ni in a 190-[mu]m thick flexible polymer mold formed by photolithographic (PL) patterning of SU-8. First generators were tested and characterized. The TEG generated a power of 12.0 [plus-or-minus sign] 1.1 nW/cm2 for a [Delta]T of 0.12 K at the [mu]TEG interface, which is equivalent to a thermoelectric efficiency factor of 0.83 [mu]W K-2 cm-2. The experimental data is in good accordance with a model introduced for the optimization of vertical micro thermoelectric generators. It allows calculation of the optimal geometric design parameters for any given material and thermal interfaces. The analysis reveals that the thermocouple length should be in the range of 80-150 [mu]m when the best thermoelectric bulk material (BiTe) is used and realistic interface condition are assumed.

Author-supplied keywords

  • Electrochemical deposition
  • SU-8
  • Thermoelectric generator

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document

There are no full text links


  • Wulf Glatz

  • Simon Muntwyler

  • Christofer Hierold

  • Anonymous

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free