Probe measurements of electron-energy distributions in plasmas: What can we measure and how can we achieve reliable results?

  • Godyak V
  • Demidov V
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Abstract

LANGMUIR PROBE; RF DISCHARGE; MAGNETIZED PLASMA; INDUCTIVE PLASMA; BAFFLED PROBE; ARGON PLASMA; TEMPERATURE; DIAGNOSTICS; PRESSURE; ION

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Authors

  • V. A. Godyak

  • V. I. Demidov

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