Semi-automatic tuning of PID gains for atomic force microscopes

  • Abramovitch D
  • Hoen S
  • Workman R
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Abstract

The control of a typical commercial Atomic Force Microscope (AFM) is through some variant on a Proportional, Integral, Derivative (PID) controller. Typically, the gains are hand tuned so as to keep the bandwidth of the system far below the first resonant frequency of the actuator. This paper shows a straightforward method of selecting PID gains from the actuator model so as to allow considerably higher bandwidths.

Author-supplied keywords

  • AFM
  • Auto-Tuning
  • PID

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Authors

  • Daniel Y. Abramovitch

  • Storrs Hoen

  • Richard Workman

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