The sensitivity of gas sensor based on single ZnO nanowire modulated by helium ion radiation

Abstract

In this letter, we present a gas sensor using a single ZnO nanowire as a sensing unit. This ZnO nanowire-based sensor has quick and high sensitive response to H2 S in air at room temperature. It has also been found that the gas sensitivity of the ZnO nanowires could be modulated and enhanced by He+ implantation at an appropriate dose. A possible explanation is given based on the modulation model of the depletion layer. © 2007 American Institute of Physics.