SMART - A program to measure SEM resolution and imaging performance

  • Joy D
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Abstract

It is important to be able to measure the parameters, such as spatial resolution, astigmastism, signal-to-noise ratio, and drift and instability, that characterize the performance of a scanning electron microscope. These quantities can be determined most reliably by a Fourier analysis of digital micrographs from the instrument, recorded under conditions of interest. A program designed to implement all of the necessary steps in an automated manner has been developed as a 'macro' for the popular, and freely available, NIH Image and SCION Image programs.

Author-supplied keywords

  • Fourier transform
  • Probe size
  • Resolution
  • Scanning electron microscope
  • Signal-to-noise

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Authors

  • D. C. Joy

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