Understanding the relation between stress and surface morphology in sputtered films : Atomistic simulations and experiments

  • Zepeda-ruiz L
  • Chason E
  • Gilmer G
 et al. 
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Authors

  • Luis A Zepeda-ruiz

  • Eric Chason

  • George H Gilmer

  • Yinmin Wang

  • Hongwei Xu

  • Abbas Nikroo

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