X-ray microanalysis: The state of the art of SDD detectors and WDS systems on scanning electron microscopes (SEM)

  • Maniguet L
  • Robaut F
  • Meuris A
 et al. 
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Over the past decade, the silicon drift detector energy-dispersive X-ray spectrometry systems (SDD-EDS) have emerged as a major breakthrough in X-ray microanalysis on scanning electron microscopes (SEM). This review covers a description of the SDD device principles and the recent technological developments. When high energy resolution or low detection limits are required, WDS detectors remain an effective tool. This review also covers the different WDS systems available on SEMs.

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  • L. Maniguet

  • F. Robaut

  • A. Meuris

  • F. Roussel-Dherbey

  • F. Chariot

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