Journal Article

Etch Rates for Micromachining Processing

  • Williams K
Journal of Microelectromechanical systems (2003) 12(6) 761-778
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Williams, K. R. (2003). Etch Rates for Micromachining Processing. Journal of Microelectromechanical Systems, 12(6), 761–778. Retrieved from https://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=546406

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