Graphene is a rapidly rising star on the horizon of materials science and condensed-matter physics. This strictly two-dimensional material exhibits exceptionally high crystal and electronic quality, and, despite its short history, has already…
(Sub-)Surface Sensing Technologies and Systems
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In this review, recent developments in the fabrication and understanding of the electronic properties of graphene nanostructures are discussed. After a brief overview of the structure of graphene and the two-dimensional transport properties, the…
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The scanning tunneling microscope is proposed as a method to measure forces as small as 10-18 N. As one application for this concept, we introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale. The…
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Rapid progress in the synthesis and processing of materials with structure on nanometer length scales has created a demand for greater scientific understanding of thermal transport in nanoscale devices, individual nanostructures, and nanostructured…
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Scanning probe microscopies (SPM) and cantilever-based sensors generally use low-frequency mechanical devices of microscale dimensions or larger. Almost universally, off-chip methods are used to sense displacement in these devices, but this approach…
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Very high frequency (VHF) nanoelectromechanical systems (NEMS) provide unprecedented sensitivity for inertial mass sensing. We demonstrate in situ measurements in real time with mass noise floor approximately 20 zg. Our best mass resolution…
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Nanomechanical resonators can now be realized that achieve fundamental resonance frequencies exceeding 1 GHz, with quality factors (Q) in the range 1,000 - 100,000. The minuscule active masses of these devices, in conjunction with their high Qs,…
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Sensors based on nanoelectromechanical systems vibrating at high and ultrahigh frequencies are capable of levels of performance that surpass those of larger sensors. Nanoelectromechanical devices have achieved unprecedented sensitivity in the…
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This paper presents a microfluidic mixer that uses acoustic stirring created by ultrasonic waves. The ultrasound is introduced into the channel by integrated piezoelectric transducers. The transducers are made of a zinc oxide thin film, which is…
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We have developed a method of measuring rf-range resonance properties of nanoelectromechanical systems (NEMS) with integrated piezoresistive strain detectors serving as signal downmixers. The technique takes advantage of the high strain sensitivity…
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This paper gives an overview of some of the recent developments in the area of chip calorimetry. Using several chip calorimeters developed at Xensor Integration and tested by users, examples of chip calorimetry and its applications will be given.…
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A micro-fluid chip calorimeter measuring system with highly stable thermostat (0.1 mK) was developed based on an improved nano calorimetry thin-film thermopile chip with excellent chemical and mechanical reliability fabricated in SU-8 technology for…
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Scanning probe thermal microscopy has been used to achieve sub-surface imaging of metallic particles embedded in a polymer matrix, using a probe which can act as both ohmic heater and thermometer. A lateral resolution of the order of a micron and a…
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Dynamic electrochemical etching technique is optimized to produce tungsten tips with controllable shape and radius of curvature of less than 10 nm. Nascent features such as "dynamic electrochemical etching" and reverse biasing after "drop-off" are…
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In this paper, we present a novel micromachined Atomic Force Microscopy (AFM) micro-cantilever equipped with a sharp, conductive platinum tip. The processing sequence proposed in this article integrates a high reproducibility and precise…
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In this article, a novel microfabricated thermoresistive scanning thermal microscopy probe is presented. It is a V-shaped silicon nitride cantilever with platinum lines and a sharp off-plane nanotip. The cantilever fabrication sequence incorporates…
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This bestselling book in the field provides a complete introduction to the physical origins of heat and mass transfer. Noted for its crystal clear presentation and easy-to-follow problem solving methodology, Incropera and Dewitt's systematic…
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This work characterizes an aspect of human bone micro-structure, pertinent to fracture initiation and arrest. It addresses how the orientation of elementary components proximate to osteocyte lacunae influences secondary osteon micro-biomechanics.…
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Problems associated with large-scale pattern growth of graphene constitute one of the main obstacles to using this material in device applications. Recently, macroscopic-scale graphene films were prepared by two-dimensional assembly of graphene…
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This article reviews the basic theoretical aspects of graphene, a one atom thick allotrope of carbon, with unusual two-dimensional Dirac-like electronic excitations. The Dirac electrons can be controlled by application of external electric and…
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