Analysis of retaining ring using finite element simulation in chemical mechanical polishing process

Abstract

During the chemical mechanical polishing process (i.e., CMP for short), it is expected to attain the requirement of global planarization. However, the stress concentration, which occurred when approaching the wafer edge, has resulted in over-grinding. The increasing material removal rate has also contributed to the wafer's nonuniformity. In this paper, a retaining ring surrounding the wafer carrier was added to the conventional CMP mechanism in order to improve the over-grinding phenomenon and avoid the wafer sliding from the carrier as much as possible. The revolutions of the wafer and the pad were assumed to be the same, and the force forms of the carrier and the retaining ring were axisymmetric uniformly-distributed. In addition, when the principle of minimum potential energy was applied, a two-dimensional axisymmetric quasi-static finite element model for CMP including the carrier, the retaining ring, the film, the wafer and the pad could be established. Following this model, the von Mises stress distribution of the wafer surface without a retaining ring was analyzed to verify the model. The effects of the gap between the ring and the pad and the ratio of the ring load and the carrier load on the stress and the wafer's nonuniformity were investigated. The results indicated that the von Mises stress distribution of the wafer surface was almost uniform near the wafer center, and the maximum value appeared near the edge. The value decreased as the edge was approached, but it rose again very close to the edge. Besides, the wafer's nonuniformity would be prohibited while the gap and the load were designed within the certain range to supply the retaining ring. © 2006 Springer-Verlag London Limited.