Atomic resolution three-dimensional electron diffraction microscopy

Abstract

A novel form of microscopy to overcome electron lens aberration (both spherical and chromatic) is described. As such, this form of microscopy does not require high-resolution electron lenses or reference waves and can image nanocrystals and nanocrystalline samples in three dimensions at ultrahigh resolution. This paper shows that the combination of the coherent electron diffraction with the oversampling method can determine the 3D structures of nanocrystals and noncrystalline samples at atomic resolution.