Automatic engineering Lot Handle System

Abstract

Nowadays, operations are almost fully automation in 300mm FAB. But some complex operations have multiple conditions that need manual control. Such as engineering experiments, pilot-run etc. those are for keeping process stable, enhancing yield and verifying technology development (TD) lot. But engineers must use different systems or paper run-cards to do experiments. That will time-consuming and have some risks of miss operation. Therefore, we are implementing a system that called Engineering Lot Handle System and we will introduce it in this paper. It integrates systems effectively, paperless operations and reduces experiment cycle time. The most important is all operations can be fully automated. © 2010 ISSM ( Intl Symp on Semiconductor Manufa.