Abstract
In this chapter we describe and explain many of the most widely used techniques for characterizing the optical, mechanical, electrical, and chemical properties of thin films, examining structures fabricated from the films, and measuring some reactor properties. Finally, some chemical analytical techniques are discussed.
Cite
CITATION STYLE
APA
Schwartz, G. C. (2006). Characterization. In Handbook of Semiconductor Interconnection Technology, Second Edition (pp. 63–152). CRC Press. https://doi.org/10.5040/9798765146330.chapter4
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