Book Chapter

CMOS fabrication

CRC Press, (2016), 12.1-12.44
DOI: 10.1109/9780470544266.ch7
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APA

Jessing, J. (2016). CMOS fabrication. In The VLSI Handbook: Second Edition (pp. 12.1-12.44). CRC Press. https://doi.org/10.1109/9780470544266.ch7

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