Conference Proceedings

The comparison of OPC performance and run time for dense versus sparse solutions

  • Abdo A
  • Stobert I
  • Viswanathan R
  • et al.
Optical Microlithography XXI (2008) 6924 69243G
DOI: 10.1117/12.772902
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Abdo, A., Stobert, I., Viswanathan, R., Burns, R., Herold, K., Kallingal, C., … Mansfield, S. (2008). The comparison of OPC performance and run time for dense versus sparse solutions. In Optical Microlithography XXI (Vol. 6924, p. 69243G). SPIE. https://doi.org/10.1117/12.772902

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