Design of variable view imaging system for active observation of micro object

Abstract

Occlusion and low resolvability are important issues in micromanipuatlaion, microassembly and inspection for conventional optical vision system. In this paper, we proposed an active vision system that can interact with the environment by changing optical system parameters such as spatial position, orientation and focus plane in a compact way. The proposed system integrates a pair of wedge prisms, a scanning mirror, a deformable mirror and off-the-shelf optics. Combining with a scanning mirror, the proposed system can observe the micro object in different views. The compact double wedge prisms can change the view direction, but cause the aberration induced by wedge prisms. It is shown that the aberration can be corrected by a deformable mirror. The proposed deformable mirror control algorithm can correct the aberration in each Zernike mode instead of controlling each actuator. The preliminary experiment setup was built, and initial experiments were demonstrated to investigate the validity of the concept of the proposed system. © ICROS.