Development of generic simulation models to evaluate wafer fabrication cluster tools

Abstract

This document presents the purpose, development and applications of generic simulation models used to design, evaluate and demonstrate the potential performance of semiconductor wafer fabrication cluster tools. The use of this type of highly integrated equipment is growing rapidly within the semiconductor manufacturing industry. Because of the complex interactions involved in cluster tools, analytical models and calculations have usually been inadequate for determining system performance. However, discrete-event simulation models have proven to be quite beneficial to cluster tool developers and owners. The models are used to simulate the performance of equipment integrating multiple process modules in a radial cont@ration. A menu-clrken interface permits analysts to customize, develop and exercise the model for a variety of cluster tools.