A Heterogeneous Environment for Computational Prototyping and Simulation Based Design of MEMS Devices

Wilson, N. M., Hsiau, Z. K., Dutton, R. W., & Pinsky, P. M. (1998). A Heterogeneous Environment for Computational Prototyping and Simulation Based Design of MEMS Devices. In Simulation of Semiconductor Processes and Devices 1998 (pp. 153–156). Springer Vienna. https://doi.org/10.1007/978-3-7091-6827-1_39