An integrated system for quantitative EDXRF analysis based on fundamental parameters

Abstract

A procedure for quantitative energy-dispersive X-ray fluorescence analysis is presented. It relies on the fundamental parameter equation and optionally uses the intensity of the scattered excitation radiation to estimate the composition and mass per unit area of the low-atomic-number part of the matrix. The procedure has been implemented as part of a larger software package, AXIL-QXAS, which includes spectrum-acquisition and spectrum-analysis programs and runs on a personal computer. © 1990.