ISFETs and ISFET array.

Abstract

ISFETs include: 1st-cond.-type semiconductor substrates; 2nd-cond.-type well regions set in the surface of the substrates; 1st-cond.-type source and drain regions set in the surface of the well regions; gate insulator films set on the source regions, well regions and the drain regions; transfer gate electrodes set on the gate insulator films and adjacent to the drain regions; liq. materials in contact with the gate insulator films; and ref. electrodes set in the liq. materials. [on SciFinder(R)]