Phase-matched second-harmonic generation in thin rectangular high-index-contrast AlGaAs waveguides

Abstract

We report the first observation of second-harmonic generation in thin rectangular high-index-contrast (HIC) birefringent-phase-matching (BPM) waveguides. We fabricated HIC waveguides composed of 0.103-μm-thick Al 0.5Ga0.5As core layers sandwiched between 1-μm-thick oxidized Al0.93Ga0.07As cladding layers by using wet etching and wet oxidation techniques. BPM has been achieved in the 1.55 μm fundamental wavelength region in 1.7-1.86-μm-wide rib-type HIC waveguides. The guide-width dependence of the phase matching wavelength is in an agreement with numerical simulation. © 2011 The Japan Society of Applied Physics.