RF MEMs variable capacitors for tunable filters

doi:10.1002/(SICI)1099-047X(199907)9:4<362::AID-MMCE7>3.0.CO;2-H

RF MEMs variable capacitors for tunable filters

by Charles L Goldsmith, Andrew Malczewski, Zhimin J Yao, Shea Chen, John Ehmke, David H Hinzel

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International Journal of RF and Microwave ComputerAided Engineering (1999)

Volume: 9, Issue: 4, Pages: 362-374

ISSN: 10964290
DOI: 10.1002/(SICI)1099-047X(199907)9:4<362::AID-MMCE7>3.0.CO;2-H

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Abstract

An RF MEMs (microelectromechanical system) variable capacitor has been demonstrated with a 22:1 tuning range, tuning from 1.5 to 33.2 pF of capacitance. This capacitor was constructed using bistable MEMs membrane capacitors with individual tuning ranges of 70:1 to 100:1, control voltages in the 3055 V range, switching speeds less than 10 μS, and operating frequencies as high as 40 GHz. These devices may eventually provide a viable alternative to electronic varactors with improved tuning range and lower loss. 1999 John Wiley & Sons, Inc. Int J RF and Microwave CAE 9: 362374, 1999.