rf-generated ambient-afterglow plasma

Abstract

Atmospheric pressure plasmas have gained importance due to their potential application in polymer surface treatment, surface cleaning of metals, thin film deposition, and destruction of biological hazards. In this paper a radio-frequency driven atmospheric pressure afterglow plasma source in argon and helium is discussed. The light intensity measurement shows that the radio-frequency discharge is continuous in time unlike the intermittent nature of a low frequency dielectric-barrier discharge. The discharge, under ambient conditions, can be generated in argon, helium, and nitrogen. Spectroscopic measurements show that metastables are capable of producing oxygen atoms and other excited species. The argon afterglow, in particular, is capable of dissociating oxygen molecules in the ambient gas. An afterglow model has been developed to study the interaction of the plasma with the ambient gas. Results from applications of the plasma to surface treatment of metals and polymers, and bacterial decontamination are briefly discussed. © 2006 American Institute of Physics.